MB--MAiA

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The MAiA^® platform - an enhanced version of SiNA^® - provides a range of options for implementing new technological approaches to increasing the efficiency of crystalline silicon solar cells. MAiA systems are also modular, and consist of several processing modules that are joined via buffer modules so that several processes can be carried out successively in one system. Each system is configured on an application-specific basis.
 

MB-PERC - Upgrade of Standard Processes for Increased Cell Efficiency
 

Passivating the rear of the wafer is a key process step in the manufacture of PERC cells (Passivated Emitter Rear Contact), a promising cell concept with potential efficiency of over 20% (on monocrystalline wafers). For manufacturing these cells, Roth & Rau provides MAiA, a production system for coating the rear with aluminum oxide - which boasts outstanding passivation properties - and a top layer of silicon nitride. With MAiA's modular structure, these coating processes can also be carried out in conjunction with the anti-reflex coating of the front in a single system.

In addition, the system can be configured for further coating processes (e.g. silicon oxide) and in line with special customer requirements. It is also suitable for carrying out plasma etching processes .